|
週次 |
日期 |
單元主題 |
|
第1週 |
2/25 |
Course Introduction,
High-Tech Fab Engineering in Nano Era
|
|
第2週 |
3/04 |
Fundamentals of IC Manufacturing Processes |
|
第3週 |
3/11 |
Fab Economics and High-tech Facilities Overview |
|
第4週 |
3/18 |
Vibration, Airborne Molecular Contamination, and
EMI Mitigation
|
|
第5週 |
3/25 |
Term Project Kickoff and 5D Tool Introduction |
|
第6週 |
4/01 |
National Holiday, No Class |
|
第7週 |
4/08 |
Site Master Planning and Code Compliance for Semiconductor Facilities |
|
第8週 |
4/15 |
Building and Structure Design |
|
第9週 |
4/22 |
No Midterm Exam., Mandatory Field Trip on 5/29 |
|
第10週 |
4/29 |
A Fab Project and Conceptual Design Process |
|
第11週 |
5/06 |
30% Design Review |
|
第12週 |
5/13 |
Fab Layout and Automated Material Handling System |
|
第13週 |
5/20 |
Electrical, Cleanroom and HVAC System Design |
|
第14週 |
5/27 |
UPW, Gases and Chemical System Design |
|
第15週 |
6/03 |
Term Project Group Meeting |
|
第16週 |
6/10 |
Waste Recycling and Green Manufacturing |
|
第17週 |
6/17 |
Group Term Project Presentation
(Final 100% Design Review)
|
|
第18週 |
6/24 |
Final Exam |